Semiconductor Chiller: The Ultimate FAQ Guide

This guide covers all information you’re looking for about semiconductor chiller such as components, working principle, features, benefits, and maintenance process, amongst others.

So, if you want to learn more about semiconductor chillers, read this guide.

What is a Semiconductor Chiller?

Semiconductor chillers are special types of chillers that you will use to cool equipment during semi-conductor production process.

Some of the semiconductor machines that you can cool using the semiconductor chillers include:

  • Scanning Lithography Machine
  • Micro-nano Coordinate Measuring Machines
  • Scanning Probe Microscopes
  • Ultra-precision Instruments

Semiconductor chiller

Semiconductor chiller

How Does the Common Industrial Chiller Compare to the Semiconductor Chiller?

Common industrial chillers as well as semiconductor chillers are special tools that you will use in the chilling process.

You can either choose to use the semiconductor chillers or the common industrial chillers depending on application requirements.

The main difference between the semiconductor chiller and the common industrial chiller is in the heat removal method.

Apart from that, semiconductor chillers have better safety mechanisms and features in relation to the common industrial chillers.

In many cases, you will use the water-cooled chillers in the semiconductor industry due to higher cooling precision.

Water-cooled semiconductor chillers are also quite in their operations in comparison to common industrial chillers.

On the other hand, you can opt for the air-cooled or water-cooled chillers for common industrial chillers.

Some of the protection devices that you will find in semi-conductor chillers are:

  • Compressor Inner Protection Devices
  • Over-current Protection Devices
  • Low- and High-Pressure Protection Devices
  • Over Temperature Protection Devices
  • Exhaust Overheat Protection Devices
  • Flowrate Protection Devices

What are the Quality Standards for the Semi-Conductor Chillers?

Quality of the semiconductor chiller is paramount and very important during your semiconductor selection process.

In other words, you should consider using semiconductor chillers that are of very high quality.

You can easily tell that a semiconductor chiller is of very high quality by looking at the right quality standards.

Here are the main quality standards that your semiconductor chiller must adhere to.

  • RoHS Quality Standards
  • DIN EN ISO Quality Standards such as DIN EN ISO 14001:2004 and DIN EN ISO 9001-2015
  • CE Quality Standards
  • AHRI Quality Standards such as AHRI WCCL or AHRI ACCL
  • UL Quality Standards

How Do You Install the Semiconductor Chillers?

Well, as soon as you purchase the semiconductor chiller you will have to inspect it first before you install it.

You will inspect the machine to confirm if there are damages on the machine or to confirm availability of every part.

It is important to have a look at these factors with reference to the installation an operation manual in the package.

In other words, you will have to read the installation and operation manual before you engage in the installation process.

As soon as everything is in place, you will go ahead and inspect the installation location.

Since we are using a water-cooled semiconductor chiller, you can have a mechanical room with proper ventilation.

Most of the materials for water-cooled chillers are not weather-proof thus the need for a good shelter from weather elements.

You must also make sure that the installation ground or surface is flat and can withstand the weight of the machine.

Gently place the semiconductor chiller in the right position and then proceed with all the relevant connections.

After that, you will establish the connection between the water supply system and the semiconductor chillers.

You have to ensure that the switch system of the water supply system is in place to ensure constant supply of water.

As soon as you complete that, you can now connect the semiconductor chiller to the machines that you intend to cool.

Which Specifications Help in Choosing Semi-Conductor Chillers?

You need to have a master plan before you engage in the selection process of the semi-conductor chillers.

In other words, you must know the right technical specifications before you begin choosing the semi-conductor chillers.

Here are the main specifications that will help you make the right choice of semiconductor chillers.

  • Cooling Capacity

The cooling capacity of the semiconductor chillers will vary depending on the application requirements.

You must choose a machine that has a greater cooling capacity range than your application requirement specifications.

  • Stability

You must also choose a machine that is stable enough with a water stability requirement of plus or minus one degree.

This will ensure that your semiconductor chiller works within a specific range and will not faulter no matter the circumstances.

  • Temperature Range

The temperature range between the machines will also vary according to the machine and application specifications.

You can have a machine that has a temperature range of positive 5 degrees centigrade to positive 35 degrees centigrade.

  • Size of the Pump

Here, you will look at specific features of the pump and its capability to pump water whenever you need to.

You should go for a pump that can ensure proper supply of water into the system to cool the semiconductors.

  • Chiller Dimensions

You must also look at the dimensions of the chiller according to the width, height, and density of the machine.

Apart from that, you will also look at the weight but this will depend entirely on the chiller cooling requirements.

  • Power Requirements

You must also look at the energy requirements of the machine in terms of how much power it consumes.

You will rate the power requirements in accordance to the region where you will be using the machine.

What are the Features of the Semiconductor Chillers?

Semiconductor chiller

Semiconductor chiller

Since we have different types of semi-conductors in the market, you should expect to have varying features.

Despite that variation, you should also expect to have common features on some of the semiconductor machines.

Here are some of the features that you can find on the semiconductor chillers.

· Perfect Control System or Panel

Modern semiconductor chillers have specific control systems with PID controllers with automatic tuning systems.

· Flow Adjustment Features

Semiconductor chillers also have flow adjustment features that will depend greatly on the external pressure.

· Positive Displacement Pumps

Most semiconductor chillers come complete with one positive displacement pump but the number will vary according to machine size.

· Corrosion Free Surfaces

All the parts of the semiconductor chillers have materials that do not corrode easily even in the presence of corrosion agents.

· Safety Systems

It features automatic safety systems such as alarms that go off to warm you of a malfunction or impending danger.

What are the Semiconductor Chiller Applications?

It is obvious that you will use the semiconductors in the semiconductor industry to cool the semiconductor appliances.

Here are some of the main applications in the semiconductor chiller in the semiconductor industry.

  • Burn- In Equipment or Machines such as wafer chuck cooling or heating equipment
  • Automatic Test Equipment for Test Head Cooling Applications
  • Laser Trimming System Cooling Applications
  • Metrology Tool Cooling Applications
  • Process Chamber Cooling Applications
  • UV Cure System Cooling Applications

What are the Main Components of the Semiconductor Chillers?

Semiconductor chillers have different parts that perform different functions to produce a cooling effect.

These parts work in conjunction with one another to help in cooling of different types of semiconductors.

Here are the main components of semiconductor chillers you need to have a look at.

Components of semicundctor chiller

Components of semiconductor chiller

· Compressor

You will depend on the compressor of the machine to compress the refrigerant to increase pressure and speed.

There are three different types of compressors that you will use including scroll, screw and centrifugal compressors.

· Refrigerant Unit

This unit consists of the refrigerant tank as well as the refrigerant that you will use to collect and deliver heat.

The sizes of the refrigerant units usually vary according to the size of the machine and cooling capacity of the machine.

· Control Panel

This is a very important part that you will use in the configuration, programming and monitoring of the semiconductor chillers.

Most of the control panels are modern touch screen systems that you can also have access to from a remote location.

· Evaporator

The evaporator is the system where the refrigerant will collect the heat while changing form from liquid to gas.

Evaporators have perfect delivery system connections that will deliver the heat that comes from the semiconductors.

· Condensers

You will depend on the condensers to take away the heat from the refrigerants thus condensing it back to water.

The condenser can either use water or air as the main cooling systems that will help in the elimination of heat.

· Expansion Valves

The expansion valves will act as the main control units or systems that will reduce the pressure of the refrigerants.

With the expansion valves, you can now feedback the refrigerants to the compressor to proceed with the process.

How does Semiconductor Chillers Work?

Semiconductor chillers have connections to the semiconductors where they collect the heat and cools it off.

After collecting the heat, it uses the delivery system to deliver the heat all the way semiconductor chiller for elimination.

Here is a step-by-step process that you can follow to completely get rid of excess heat using the semiconductor chillers.

· Preparation Stage

First, you must prepare the machine accordingly and program it from the control panel.

You will set the cooling specifications according to the required cooling standards of the semiconductor chillers.

As soon as you press start, the machine will automatically begin the cooling operations according to specification requirements.

You can also opt for an automatic semiconductor chiller that will use sensors to trigger the cooling process.

· Compression of Refrigerants

Refrigerants will move from the refrigerant storage tank to the compressor unit of the semiconductor chillers.

Depending on the type of compressor, the machine will compress the refrigerant, increasing the pressure and speed.

It will move from the compressor unit straight to the evaporator for collection of heat.

· Collection of Heat

While in the evaporator, the refrigerant will encounter the heat that comes from the semiconductor system.

It will collect the heat from that system and change its form from liquid to gas loaded with enough heat.

Under the same speed and pressure, the gas will flow straight to the condenser to deliver the heat.

· Elimination of Heat

Here, the machine will get rid of the heat from the gas using water or air as the cooling fluids.

The condensers have delay tanks that often increase the residence time within the machine.

Also, the higher the residence time within the condenser the greater the heat absorption rate.

The cooling fluid will collect the heat from the refrigerant as it condenses it back to the liquid form.

The cooling fluid, loaded with the heat will deliver the heat to the elimination chamber to eliminate it completely.

· Final Stage

Finally, the machine will deliver the refrigerant to the expansion valve to reduce the excess pressure.

The expansion will also feed the compressors accordingly and the whole process will begin once again.

How Does the Scroll Semiconductor Chiller Compare to Screw Semiconductor Chiller?

Just from the name, you will note that there is a difference between the two types of semiconductor chillers.

The main difference between the scroll chillers and screw chillers in semiconductor industry is in the type of compressors.

Scroll semiconductor chillers have scroll compressors while screw semiconductor chillers have screw compressors.

The difference in the type of compressors will dictate the different working principles of the two types of semiconductor chillers.

Apart from that, scroll compressors often produce low noise levels at very low vibration rates.

On the other hand, screw compressors are often louder with greater rates of vibration than scroll chillers.

Despite those differences, most of the other systems on the semiconductor chillers have similar characteristics.

Scroll chiller

Scroll chiller

Screw chiller

Screw chiller

Do You Supply Centrifugal Semiconductor Chillers?

Yes, we also supply centrifugal chillers according to the specifications of the customers.

The centrifugal chillers have centrifugal compressor units that assist in compression of the refrigerants.

You will use the centrifugal chillers in large scale semiconductor cooling applications.

It has the ability to compress greater volumes of refrigerants over greater distances for large scale applications.

What is the Difference Between the Water-Cooled and Air-Cooled Semiconductor Chiller?

You can also note the difference between the water-cooled chiller and air-cooled chiller for semiconductors just from the names.

Water-cooled semiconductor chillers use water as the main chilling or cooling agent.

On the other hand, air-cooled semiconductor chillers use air as the main cooling agent.

Apart from that, water-cooled semiconductor chillers produce minimal noise levels.

On the flip side, air-cooled semiconductor chillers often produce a lot of noise during the cooling process.

Due to the high noise levels, you can install the air-cooled semiconductor chillers outside the building.

It is safer outside the building because it has weather proof materials and has plenty of ventilation.

Water-cooled chillers, however, need a mechanical room to protect it from the effects of weather thus increasing durability.

What are Closed Loop Non-Refrigerated Semiconductor Chillers?

Well, closed loop non-refrigerated semiconductor chillers are special types of cooling machines.

It employs a closed loop system which helps in the circulation of refrigerant within a closed loop system.

In other words, it is capable of collecting and eliminating heat from the semiconductors without exiting the loop.

How Much Does the Semiconductor Chiller Cost?

You can purchase the semiconductor chillers at different prices ranging from 10,000 to 80,000 US dollars.

The variation in price usually comes as a result of the different types of semiconductor chillers in the industry.

You will note that high quality semiconductor chillers often cost a lot more than low quality semiconductor chillers.

Apart from that, you will also spend more on semiconductor chillers that are of greater capacity than others.

You should note that scroll semiconductor chillers will have a different price tag than centrifugal semiconductor chillers.

What are the Advantages of the Semiconductor Chillers?

There are numerous benefits that come with the use of the semiconductor chillers.

Here are some of the benefits that you will experience when using the semiconductor chillers.

  • Versatility

You can get a wide variation of semiconductor chillers with different cooling capacities ranging from 0.5 to 98 tons.

You can choose the right type of semiconductor chiller that will match the right chilling specifications.

  • Great Chiller Features

Semiconductor chillers also have the greatest features that will enhance the chilling process at very low costs.

It comes complete with low electric power consumption, high efficiency, low noise levels, and minimal vibration.

  • Minimal Need for Modification

You will not need to modify the machine further because it comes complete all the necessary requirements of chillers.

For instance, it has a greater water and refrigerant capacity thus exempting you from having additional units.

  • Easy to Maintain

You will also go through a very simple process while maintaining the semiconductor chillers since it does not stain easily.

Apart from that, semiconductor chillers have special types of materials that do not corrode or contaminate the fluids.

  • Compact Design

You should also note that the semiconductor chillers have a compact design that allows you to install it anywhere.

It is also portable despite the weight thus making it easy to move it indoor or outdoor during the installation process.

Why Should You Import Semiconductor Chillers from China?

China is the leading manufacturer and exporter for semiconductor chillers.

You should consider importing your semiconductor chillers from China due to the following reasons.

  • High Quality Materials

In support of OEM business, Chinese manufacturers use original raw materials to manufacture semiconductor chillers.

You are sure if getting very high-quality semiconductor chillers that will serve you for a long period.

  • Affordable Pricing

You should also believe that the high-quality semiconductor machines are quite affordable in China.

The price control systems in relation to demand and supply regulators set the price at very affordable levels.

  • Wide Variety

You will also relish the opportunity of choosing the different varieties and types of semiconductor chillers.

You are sure of getting the right type of machine that will fit your application requirements or specifications.

  • Ease of Conducting Business

With great infrastructure and perfect business acumen, you are sure of getting the best deals from China.

After conducting business, you will comfortably transport your goods out of China using the developed transport network.

How Does a Semiconductor Chiller Compare to a Semiconductor Heat Exchanger?

Semiconductor chillers and semiconductor heat exchangers are machines that you can use in elimination of heat.

Despite the functional similarity, you will note that there are design or structural differences between them.

Semiconductor chillers have a refrigeration unit which helps in the elimination of heat from the system.

On the other hand, semiconductor heat exchangers do not have refrigeration units to help in elimination of heat.

It uses the fluid heat exchange capabilities to help in the cooling process of the semiconductor chillers.

Are Semiconductor Chillers Durable?

Absolutely, semiconductor chillers are highly durable and will serve the cooling or chilling purpose for a long period.

However, the duration period will depend on quite a number of factors that you need to take care of.

Implying that there are industry standards that you have to conform to in order to increase durability of semiconductor chillers.

Here are the main factors that you need to have a look at to increase durability.

  • Type of Semiconductor Chillers
  • Degree of Maintenance
  • Machine Loading and Run- Time

Adhering to the above factors will ensure that you get the longest duration of semiconductor chillers.

Which Underlying Cooling Systems Help in Operating Semiconductor Chillers?

There are two main underlying cooling systems that help in the operation of the semiconductor chillers.

Here are the main underlying cooling systems you ought to understand when operating semiconductor chillers.

  • Vapor Compression

It employs a compression unit which will generate the cooling effect and convert vaporized refrigerants to cool liquid forms.

You will find the vapor compression system within air-cooled, water-cooled and evaporative condenser semiconductor chillers.

  • Heat Absorption

This is a cheaper, low energy cooling unit that will channel coolants through heated processes in single-phase cooling cycles.

You will use this type in water-based refrigerants which have lithium bromide as the main absorbent.

What is the Significance of Replacing Broken Parts of the Semiconductor Chillers?

You should consider replacing the old and worn-out parts of the semiconductor chillers with new parts.

Replacing such systems will help in boosting the operations of the semiconductor chillers.

It will also reduce the cost of operating the semiconductor chillers as it maintains very low energy consumption levels.

In addition to that, you will not experience working problems or failures especially over critical or demanding applications.

Finally, you can replace the broken parts with better technology which will increase the working efficiency.

How Do You Troubleshoot the Semiconductor Chillers?

You should consider troubleshooting the semiconductor chillers when it develops particular working problems.

Troubleshooting will help in identifying the main source of problems on the semiconductor chillers.

Here are some of the problems that you can identify through proper troubleshooting processes.

  • Failure of machine to Start

The machine may fail to start operating because it has power issues that do not supply enough power.

In this case, you will need an electrician to check the power system and fix it in order to avoid such issues.

  • Insufficient Cooling

The machine may also have insufficient cooling capabilities and may not perform the functions as usual.

This can be a result of pump failure, blocked units, or leaking systems within the machine.

Through proper maintenance, you can easily adjust such issues to allow the machine to work accordingly.

What is the Maintenance Process of the Semiconductor Chillers?

Well, you ought to have a checklist during the maintenance process of the semiconductor chillers.

This checklist will ensure that you maintain all the parts of the machine accordingly.

Here are some of the features that you ought to have on your maintenance checklist.

  • Routine inspection of all the water outlets and inlets
  • Inspection of the compressor unit components such as oil levels, vibrations and leaks
  • Inspection and cleaning of the electrical contacts
  • Inspection, cleaning, and replacement of the filter units

At TopChiller, we design and manufacture a range of high performance chiller systems such as water chiller, oil chiller, air chiller and glycol chillers, amongst others.

For any inquiries or questions about semiconductor chillers, contact TopChiller now.

Scroll to Top