TopChiller is Your Reliable Semiconductor Chiller Manufacturer and Supplier in China

TopChiller Semiconductor Chiller Manufacturer and Supplier In China

  • Cooling capacity ranges from 1.5KW to 128KW
  • Temperature control ranges from 7°C to 35°C
  • Top branded energy-efficient scroll compressor
  • Copper cooling wires & titanium heat exchanger
  • Microcomputer chip & In-built memory function
  • Large refrigeration capacity & quiet operation
  • Overheat and Current auto-protection system
  • Warranty up to 24 months after first purchase

Your Reliable Semiconductor Chiller Manufacturer and Supplier in China over 20 Years

General Description

Semiconductor Chiller is a cooling device that is used to produce a cooling effect during semiconductor production processing.
Temperature control of equipment during semiconductor production is a critical process is controlled by Semiconductor Chiller either by air conditioning or liquid cooling.

TopChiller is the most emerging and leading manufacturer and supplier Company in China working for the last twenty years to manufacture reliable Semiconductor Chillers.

TopChiller launched full stock of Semiconductor Chiller Models all over the world with high reliability and trustworthiness since 1999.

Scroll compressor, water tank, water pump, condenser, refrigerant tank, condenser, expansion valve, fluid reservoir, airflow inlet, PID temperature controller, hot gas bypass are the basic components used by TopChiller to design Semiconductor Chiller…

TopChiller designed Semiconductor Chiller has various applications as:

Semiconductors processing, microchip manufacturing, PVD, ashing, atomic absorption spectrometry, ATE (automatic test equipment), lithography, mass spectroscopy (MS), metrology tools cooling, CMP, UV cure system, crystal growing, and cutting/dicing, etc.

Are you looking for a Semiconductor Chiller for cooling production in chip manufacturing and semiconductor production processing?

Are you pondering over the best manufacturer of Semiconductor Chiller in China for precise temperature maintenance of equipment to support your business?  The TopChiller team is looking for your response.

Do contact with TopChiller personnel for getting full technical support in selecting the best-suited Semiconductor Chiller for your application at reasonable costs.

Features and Advantages

  • TopChiller brand Semiconductor Chiller operates fluently with low power configured by the use of hot gas bypass with compressor recirculating system, detecting temperature change and stops compressor working preventing from extra power loss.


  • Semiconductor Chiller gets attached to the semiconductors or semiconductor processing equipment, efficiently collects heat, and proceeds it further to release it from unit either through cooled air or liquid.


  • Semiconductor Chiller made by TopChiller is equipped with energy-efficient scroll compressors that are noise sensitive, producing little or no vibration


  • Semiconductor Chiller requires less or no accessories having large capacity water and glycol solution tank water


  • PID-based temperature controller and other protecting devices as pressure protection, over current protection, and flow rate protection ensures high durable and precise operation of Semiconductor Chiller

Semiconductor Chiller Technical Specifications

Cooling capacityKcal/h
 Input powerKW0.881.3522.252.663.274.075.756.458.2511.512.917.45
Max CurrentA5.48.21213.
Power source1PH~220V/3PH~220V/380V 50HZ/60HZ3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V   50HZ/60HZ)
ControlCapillary / thermostatic expansion valve
CompressorTypeHermetic RotaryHermetic scroll ( piston )
CondenserType Efficient finned copper tube with aluminum+low noise external rotor fan
Air flow (m3/h)750100015002000250030004000500060008000100001200015000
Air blower(KW)×20.14×20.19×20.19×20.25×20.45×20.45×20.6×2
EvaporatorTypeSS Tank coil / shell and tube type / Plate type heat exchanger
 Chilled water
Water tank(L)10.618.3272750506060110120200200270
Inlet/outlet pipe
(inch) i
Water pumpPower (kw)0.370.370.370.370.370.370.370.750.750.751.51.52.2
Max lift(m)22222222222222303025252528
Max flow (m3)
Safety protectionCompressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection
Dimension L(mm)550550600600720980980115011501350150015001860
Net weight(KG)45628595125152175185215283345382580
The above specifications are according to the following design conditions:
1, 12℃/7℃.Chilled water inlet/outlet temperature 12℃/7℃.
2, 33℃/38℃.Cooling air inlet/outlet temperature 33℃/38℃.
We reserve the right to modify the specification without further notice.


Semiconductor Chiller Technical Specifications

Cooling capacityKcal/h
Input powerKW17.121.732225.424.833.3933.144.9143.357.35465
Max CurrentA43.252.753.363.761.38180.2109106135.5128.5135
Power source3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V   50HZ/60HZ)
ControlCapillary / Thermostatic expansion valve
CompressorTypeHermetic scroll ( piston )
CondenserTypeEfficient finned copper tube with aluminum+low noise external rotor fan
Air flow (m³/h)150002000020000250002500030000300004000040000500005000060000
Air blower(KW)0.6×20.78×20.78×20.78×20.78×20.42×60.42×60.6×60.6×60.78×60.78×60.78×6
EvaporatorTypeSS Tank coil/ shell and tube type/Plate type heat exchanger
Chilled water
Water tank(L)270350350350350420420580580580580580
 inlet/outlet pipe
Water pumpPower(kw)
Max lift(m)282828282830303030323232
Max flow (m³)
Safety devicesCompressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection
Net weight(KG)58065065081081089089011121112132013201320
The above specifications are according to the following design conditions:
1, Chilled water inlet/outlet temperature 12℃/7℃.
2, Cooling air inlet/outlet temperature 33℃/38℃.
We reserve the right to modify the specification without further notice.

Semiconductor Chiller Configuration Table

Electrical componentsSCHNEIDER/CHINTFRANCE/


Pressure controllerFENSHENTAIWAN
Oil pressure gauge (high & low)HONGSENTAIWAN
Temperature controllerPUNPCHINA
Expansion valve/capililaryFANFOSSUSA
Liquid receiverTOPCHILLERChina
Air blowerJULITaiwan

TopChiller Free Service and Technical Support

As a professional chiller manufacturer for over 20 years, TopChiller is always happy to provide our free service and technical support accessible to our clients before, during, and after-sales. If you need any help, welcome to call us or send your inquiry to our email. These free services and technical support include;

  • Listening to your detailed chiller requirements and giving your best chiller solution for your applications based on our rich experience.
  • If you have no idea about how to size your chiller model or cooling capacity, it’s not a big issue, Just tell us your specific cooling demands, we will guide you to select the right economical chiller model.
  • 7*24 online service, If you have any problem with the chiller, you may call us or send an email, we are always here to support you.

TopChiller Standard Warranty Time

After purchasing the TopChiller products, you are our valued customers in the TopChiller ERP system.

We will do regular tracking service and Your chiller has up to 24 months warranty time after installation and commissioning,

If your chiller is down, you can contact TopChiller for support to solve your problem.Once we received your message, Our service technician on duty will contact you as soon as possible.

TopChiller Start-up & Commissioning

TopChiller also provides the additional service of start-up or commissioning of your chiller. You’d better before scheduling your start-up, it is important that the proper installation procedures have been followed and the chiller is ready.
TopChiller technician will guide you on how to start up your chiller when your chiller is ready, besides this, we have full sets of paper works including Chiller installation manual, operation manual, electrical drawing for you.

Free Replacement Spare Parts

Providing free replacement spare parts for TopChiller is the best customer service in the industry to support you when you are sourcing replacement parts.

We have most parts are in stock and available for next-day shipment for your chillers.

If you want to have some replacement spare parts, just provide us your chiller serial number and model number to expedite the sourcing process.

Better to have the nameplate and pictures of your chiller for our reference. This will help us find the proper replacements at the earliest time.

6 Points Why TopChiller Is Your Best semiconductor Chiller Manufacturer and Supplier in China?

Professional Manufacturer
TopChiller is your professional semiconductor chiller manufacturer and supplier with over 20 years of experience. We believe TopChiller has all semiconductor chiller cooling capacities&models to meet your specific cooling demands.
Free Design Selection
Based on our rich experience in semiconductor chiller design and manufacturing, We are willing to help you work out the right semiconductor chiller design and model selection suitable for your specific cooling requirements.
Maximize Your Benefit
TopChiller is supplying high-quality semiconductor chillers to save your costs. Our semiconductor chillers is designed and manufactured based on the most optimized refrigeration solution which will maximize your benefit.
Fastest Delivery Time
For standard configuration semiconductor chillers, we always have complete models finished stocks at the warehouse, This will make sure our semiconductor chillers will meet your urgent needs at the earliest time.
24 Months Warranty
After purchasing our semiconductor chillers, you have up to 24 months warranty time which covers Compressor, Condenser, Evaporator, Electrical Components, and other refrigeration spare parts. Within warranty time, we will provide you with free spare parts including the shipping rate.
7*24 Online Support
TopChiller is providing 24*7*365 online services to support your business. No matter you are having problems with chiller model selection, quotation, delivery, installation/commission and after-sales service, just leave your messages, you will get our fast feedback within 2 hours.

Know More Other Chiller Products Related With Semiconductor Chiller

Semiconductor Chiller-An Ultimate Buying Guide by TopChiller

A Semiconductor Chiller is the perfect refrigeration solution for the heat produced in your semiconductor industries.

In semiconductor industries, A Semiconductor Chiller is used to remove the heat generated by the manufacturing process. It is necessary to remove the extra heat for the protection of the semiconductor machine and the industry.

A Semiconductor Chiller is an excellent cooling device, and it has a lot of benefits. To operate it better, we must be well aware of the manufacturing and construction.

This article is a complete guide on the applications, maintenance, efficiency, and troubleshooting problems of a Semiconductor Chiller, so let’s start.

What is a Semiconductor Chiller?

A Semiconductor Chiller is a specialized Cooling device assembly used for removing heat loads in semiconductor-related industries.

A regular industrial chiller can also be used to deal with the heat produced in semiconductor manufacturing industries but using a Semiconductor Chiller is more conventional for accurate precision.

A semiconductor industry uses certain machines such as scanning probe microscope, scanning lithotripsy machine, and ultra-precision instruments.

These machines produce heat that must be displaced so that an optimum temperature can be maintained.

A Semiconductor Chiller helps in saving money in the long run since it protects your equipment and also is necessary for the safety and convenience of the people working in the industry.

It is portable and produces less noise; therefore, suitable to be used in industry. Also, it is not heavy on the pocket and serves its purpose in the semiconductor industry.

What are the Main Components of a Semiconductor Chiller?

A Semiconductor Chiller has six main components that are necessary for its function.

  • Compressor

A Semiconductor Chiller can have three different types of compressors such as screw, scroll, and centrifugal compressors.

It compresses the refrigerant and increases the speed and pressure to improve the function of the Semiconductor Chiller.

  • Evaporator

The evaporator is responsible for turning the refrigerant from a liquid to a gas by heating. The heat produced from the semiconductors is used here for this transition.

  • Condenser

It deals with the conversion of the refrigerant in a Semiconductor Chiller back into a liquid state. The condenser can either use water or air for cooling purposes.

  • Refrigerant Unit

A Semiconductor Chiller is equipped with a refrigerant unit that might vary in size depending upon the size of the chiller.

The refrigerant unit is composed of the refrigerant tank with the refrigerant in it. Different types of Semiconductor Chiller have varying types of refrigerants.

It is necessary to focus on the quality of the refrigerant.

  • Control Panel

It enables you to monitor and control your Semiconductor Chiller even if you are away from the installation.

A control panel gives you access to the whole machinery so that you can adjust the function according to your needs and demands.

It comes in the form of a touch screen coupled with a microprocessor and uses advanced technology.

  • Expansion Valve

The refrigerant can be fed back to the Semiconductor Chiller by using the expansion valves. These valves reduce the pressure of the refrigerant.

What are the main Features of Semiconductor Chiller?

The main features of Semiconductor Chiller that make it unique are as follows;

  • Due to the access to the most advanced technology, a Semiconductor Chiller has the most reliable control panel. It also gives you remote access.
  • You can adjust the flow rate and other specifications.
  • It does not produce noise while operating.
  • A Semiconductor Chiller is safe to operate and has reasonable safety mechanisms.
  • It comes with corrosion-free surfaces. Therefore, you don’t have to worry about any external factors that cause corrosion.
  • A Semiconductor Chiller has positive displacement pumps according to the requirements of the application.
  • Also, you can adjust the features based on your requirements through the control panel.

How does a Semiconductor Chiller Work?

A Semiconductor Chiller works by utilizing the energy from the heating and cooling of the fluid.


Step 1

  • In the first step, you have to set the function of your Semiconductor Chiller according to your requirements. It is done through the control panel.
  • Once you feed all the requirements and press start, the Semiconductor Chiller starts performing its action that is, cooling.
  • The cooling begins with the help of built-in sensors.


 Step 2

  • The refrigerant is transported to the compressor of the Semiconductor Chiller.
  • Here, the refrigerant is compressed and then transferred to the evaporator.

Step 3

  • In the evaporator, the refrigerant absorbs the heat generated from the semiconductors and transitions from one form to another.
  • The liquid refrigerants convert into gas.
  • While maintaining the same speed and pressure, this gas is taken towards the condenser where it liberates the heart.

Step 4

  • In this step, the cooling fluid takes up the heat from the refrigerant and allows it to stay to get rid of the heat.
  • The cooling fluid can be water or air.
  • Then the refrigerant is again converted into a liquid form.

Step 5

  • Now the excess pressure of the refrigerant is released by sending the refrigerant to the expansion valve.
  • The whole process can start again once the compressor receives the refrigerant.

What is the Difference Between Water Cooled and Air Cooled Semiconductor Chiller?

The main difference between a Water-Cooled Semiconductor Chiller and an Air-Cooled is the cooling agent.

A Water Cooled Semiconductor Chiller uses water for its function and therefore needs a constant supply of water.

It is more suitable for indoor applications because it produces less noise and is susceptible to external agents like sunlight and heat. Also, it is bigger and needs more maintenance than an Air-Cooled Semiconductor Chiller.

On the other hand, Air Cooled Semiconductor Chiller uses air as a cooling agent and therefore is more affordable. It is easy to maintain, but it produces a lot of noise, which is why it is mounted outside the industry.

An Air-Cooled Semiconductor Chiller can resist direct sunlight and needs good ventilation for its function.

Keeping the above points in mind, the Water Cooled Semiconductor Chiller costs you a little more than the Air-Cooled Semiconductor Chiller, and there is a definite difference in the utility bills as well.

What is a Closed-Loop Non-Refrigerated Semiconductor Chiller?

A closed-loop non-refrigerated Semiconductor Chiller is a specific type of Semiconductor Chiller that works in a closed-loop and saves up on the refrigerant.

It uses the refrigerant by circulating it in a closed-loop, thus reducing the cost and maintenance of the refrigerant.

It performs its cooling function and eliminates heat from a system by relying on the circulation system and, therefore, is a very convenient machine.

It is more economical because it saves up the money spent on the constant supply of water, coolant, and refrigerant.

Which Specifications Help in Choosing the Best Semiconductor Chiller for your Application?

Before purchasing a Semiconductor Chiller, it is necessary to go through the specifications so that you choose the one that suits your requirements. Following are a few specifications that you must consider before making a purchase;

  • Make sure that you check the stability of your Semiconductor Chiller to see if it is stable with a stability requirement of minus or plus one degree.
  • The temperature range of your Semiconductor Chiller must match the requirements of your application. It must have a range of 5 degrees to 35 degrees Celsius to produce a cooling function.
  • The cooling capacity is also an important factor. If you have a small application, you can go for a smaller cooling capacity; however, if your application has huge cooling loads, go for a large cooling capacity.
  • You must consider the energy consumption and power consumption of your Semiconductor Chiller. Whether it is water-cooled or air-cooled, it will need some energy and a stable electricity connection to operate.
  • It is necessary to look at the size, weight, and height of the Semiconductor Chiller so that its place of installment can be decided.
  • The ability of the pump to ensure a stable supply of water is an important thing. This water is then used to cool down the semiconductors.

What are the Applications of a Semiconductor Chiller?

A Semiconductor Chiller is exclusive for semiconductor manufacturing units, and it is used for the following applications;

  • It is used in the process chamber cooling applications
  • Laser trimming systems require a Semiconductor Chiller for their cooling loads.
  • It is also used in metrology tool cooling appliances.
  • UV cure systems using appliances require a Semiconductor Chiller to deal with the cooling process.
  • A Semiconductor Chiller is necessary for burn-in equipment that is used for cooling or heating.
  • Automatic test equipment also needs a Semiconductor chiller to displace the extra heat.
  • A Semiconductor Chiller serves the purpose of producing cooling in all of its applications.

How can you Compare a Semiconductor Chiller to a Semiconductor Heat Exchanger?

Both the Semiconductor Chiller and the Semiconductor Heat Exchanger are for the removal of extra heat from the semiconductor-producing industries.

The main difference is the use of refrigeration units by the Semiconductor Chiller and the use of fluid heat exchange capabilities by the Semiconductor Heat Exchanger to perform their function.

Also, there is a difference between the structures of the two machines, which affects the quality of function of each of them. Both the cooling assemblies are built on entirely different designs.

However, both of these machines can be used for greater efficiency and well-organized removal of heat and protection of other equipment in the industry.

What are the Advantages of a Semiconductor Chiller?

A Semiconductor Chiller comes with a long list of advantages, a few of which are listed down below;

  • Unique Design

A Semiconductor Chiller is made on a unique and innovative design that is in favor of the better function of the Chiller.

  • Compact

The compact design of a Semiconductor Chiller allows you to install it at any place that you desire.

  • Versatile

Different Semiconductor Chiller models allow you to choose the best one that is most suitable for your requirement. There is a huge capacity range variation from 0.5 to 98 tons.

  • Cooling Power

It has a good chilling capacity and performs the chilling function very well.

  • Low Billing

A Semiconductor Chiller has low running costs by having low electricity consumption and high efficiency, and low operational noise.

  • Easy Maintenance

A Semiconductor Chiller is easy to maintain and does not require much money for maintenance. An annual maintenance routine would also be fine and will serve the purpose.

 How to Install your Semiconductor Chiller?

The installation steps for a Semiconductor Chiller are as follows;

  • Make sure you have received all the components of your Semiconductor Chiller the moment you receive the package.
  • Inspect your Semiconductor Chiller to see if there is any damage to the machine so that you can avoid any inconvenience.
  • Now, look at the manual that comes with your Semiconductor Chiller and read it out carefully so that you don’t miss any important points.
  • First of all, you have to decide the location for installation. It depends on whether you have a water-cooled or an Air-Cooled Semiconductor Chiller.
  • Now carefully inspect the site of installation and make sure that there are stable electricity and water supply.
  • Also, make sure that your Semiconductor Chiller is safe from harmful external elements like direct sunlight, dust storm, etc.
  • It is necessary to choose a hard and strong flat surface for the installation.
  • Make sure there is enough space for the ventilation of the machine.
  • Carefully place your Semiconductor Chiller in the decided place and set up all the connections.
  • The establishment of a power supply is necessary.
  • A stable water supply is also a must in the case of a water Cooled Semiconductor Chiller.
  • The last step is to connect your Semiconductor Chiller to the machines that need to be cooled down.

What are the Maintenance Tips for your Semiconductor Chiller?

The maintenance of your Semiconductor Chiller is necessary for its long life and better function. Here are a few maintenance tips that you must adopt.

  • Make sure that all the vents and pipes of your Semiconductor Chiller are open and patent.
  • Make a monthly cleaning routine and get rid of any dust particles, contaminants, ions, and other substances.
  • Check the oil and refrigerant levels of your Semiconductor Chiller regularly.
  • Make sure all the electrical contacts are safe and well insulated.
  • Look for any damages and fix them as soon as you find them so that you can avoid any bigger issues.
  • Clean and replace your filter units if required.
  • Find out if there are any leaks or vibrations that must be corrected.
  • Carry out a bi-annual or annual inspection to assess the condition of your Semiconductor Chiller.

What are the Safety Precautions you must take while using your Semiconductor Chiller?

As a Semiconductor Chiller is an electrically operated machine that deals with heat, it is necessary to be careful while operating it.

  • Only a professionally trained person should operate the Semiconductor Chiller.
  • Make sure that all the insulations of the wires are intact.
  • There should be no fluctuations in the power supply.
  • You should be careful not to touch the Semiconductor Chiller while working around it.
  • One should never try to take things into their own hands whenever a problem arises. Always contact a trained professional or at least operate it in the presence of an experienced person.
  • Make sure the temperature and quantity of the refrigerants are sufficient and optimum so that it doesn’t leak or flow unnecessarily through the system.

What are the Main Problems Encountered while using a Semiconductor Chiller?

When a machine is being used regularly, a few problems arise that must be taken care of so that the Semiconductor Chiller lasts longer.

Here are a few main problems that are commonly observed;

  1. Shutting Down
  • There are times when your Semiconductor Chiller stops working immediately. This might be due to loss of electricity connection or lower levels of coolant and refrigerant.
  • Another reason might be the exhaustion of the machine because of working for long hours.
  1. Insufficient Cooling
  • A Semiconductor Chiller might stop cooling because of insufficient coolant and refrigerant.
  • Another reason can be the accumulation of dirt or some leakage in the system.

How to Troubleshoot the Problems of your Semiconductor Chiller?

To troubleshoot the above-mentioned problems, you should call an electrician to check the cause of the compromised function.

  • The electrician should also fix any wiring and insulation issues.
  • Check your electricity and water supply connection.
  • Make sure that your Semiconductor Chiller is clean and devoid of all the impurities.
  • Monitor the levels of the coolant and refrigerant.
  • Check the quality of the refrigerant.

How to Increase the Efficiency of your Semiconductor Chiller?

There are many ways in which you can increase the efficiency of your Semiconductor Chiller; some of these are stated below;

  • Keep your Semiconductor Chiller clean.
  • Monitor the levels of the coolant and the refrigerant.
  • Make sure you use high-quality refrigerants.
  • Do not let any contaminants accumulate in your Semiconductor Chiller.
  • By adding more compressors and running them parallel, you can increase the efficiency of your Semiconductor Chiller.

FAQs of Semiconductor Chiller.

What is the Difference Between a Scroll Semiconductor Chiller and a Screw Semiconductor Chiller?

The main difference between a Scroll Semiconductor Chiller and a Screw semiconductor Chiller is the use of scroll and screw compressor, respectively.

What is the Average Cost of a Semiconductor Chiller?

The cost of a Semiconductor Chiller lies within the range of 10,000 to 80,000 US dollars.

How to Check the Quality of a Semiconductor Chiller?

For the quality of a Semiconductor Chiller, you must consider CE quality standards, UL quality standards, RoHS quality standards, and AHR1 quality standards.

How to Maintain the Durability of a Semiconductor Chiller?

For maximum durability, you should keep a check on the load, model, maintenance, and efficiency of your Semiconductor Chiller.

Which Kind of Refrigerant is used in a Semiconductor Chiller?

A Semiconductor might use R-134a, R-404A, R-407C, or R-410a based on the model and other specifications.

What is the Evaporator of a Semiconductor Chiller made of?

The evaporator of your Semiconductor Chiller is made up of stainless steel.

Is a Semiconductor Chiller Corrosion Resistant?

Yes, a Semiconductor Chiller is corrosion resistant and fights well against corroding agents.

What is RLA in a Semiconductor Chiller?

RLA refers to the resting load amps of your Semiconductor Chiller that are drawn by the motor of the compressor.

What is Meant by the Setpoint of a Semiconductor Chiller?

The setpoint of your Semiconductor Chiller is to estimate the speed and number of the condenser fans for different operating stages.

What Kind of Water is used in a Semiconductor Chiller?

A Semiconductor Chiller prefers the use of deionizing water, which does not allow the current to flow through it. Glycol water can also be used for the prevention of bacterial growth and freezing.

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